Kalrez® News 1 - Article 11

DuPont Dow Elastomers Features New, Low Particle Generation Kalrez® Seals At SEMICON West

* Copyright for photograph

DuPont Dow Elastomers continues to advance sealing technology with the development of new seals to enhance performance in highly aggressive environments like NF3 and oxygen plasma. Kalrez® Sahara™ 8085, featured at Semicon West 2002, is a new compound specifically developed for very low particle generation and low weight loss in HDPCVD, PECVD, etc.

"NF3 is an efficient etching tool and a product of choice for many semiconductor chip fabricators, but under certain operating conditions may be damaging to elastomeric seals. We developed Kalrez® Sahara™ 8085 with NF3 plasma in mind." says Masato Chida, Global Semicon Marketing Manager - Kalrez®. "Customers who have used Kalrez® Sahara™ 8085 claim that it has improved wafer yield, in some cases, up to two hundred percent in applications where NF3 plasma is used for cleaning." It has demonstrated excellent mechanical properties, and is well-suited for both static and dynamic sealing applications such as bonded slit valve doors, bonded gate valves, gas inlets, gas orifice seals and gas feed-through seals claims Chida.

Kalrez® Sahara™ 8085 complements Kalrez® Sahara™ 8575 to help improve productivity and increase wafer yields, while delivering extended seal life and reduced particle generation, according to the company.

Also introduced at Semicon West is Kalrez® 8002 a new specialty product designed for select plasma and gas deposition processes where ultra low particle generation is required. This unfilled compound offers lower contamination and reduced particle generation than filled compounds. Kalrez® 8002 exhibits excellent resistance to plasmas and gas deposition chemistries, has good mechanical properties and is well suited for static and low sealing force applications.

DuPont Dow's "wet range" of Kalrez® perfluoroelastomer compounds has been strengthened significantly by the addition of Kalrez® 6375UP. This perflouroelastomer compound resists all wet process chemicals, amine-base strippers, acids and bases, and displays good mechanical strength and compression set properties at continuous service temperatures up to 275°C.

Kalrez® UltraPure™ perfluoroelastomer parts are produced only by DuPont Dow Elastomers and are specially cleaned and double packaged in Class 100 Workstations to significantly reduce contamination. Each item is individually packaged in a bar-coded bag for full traceability and is available as O-rings, sheets, and custom parts.

About DuPont Dow Elastomers

DuPont Dow Elastomers, a global supplier of specialty elastomers with global headquarters in Wilmington, Delaware, is a joint venture between the DuPont Company and The Dow Chemical Company, with more than US $1 billion in sales. The company is the industry leader in chloroelastomers, ethylene elastomers and fluorinated elastomers, serving the automotive, chemical, construction, general rubber and wire and cable industries.

Kalrez® is a registered trademark of DuPont.

Kalrez® Sahara™ and Kalrez® UltraPure™ are trademarks of DuPont.

* © Photographer: Jayesh Nair of Mumbai, Maharashtra, India | Agency stock.XCHNG

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